Cleaning Your Tools

Our tools are machined in a general laboratory environment and should be thoroughly cleaned before being used for sensitive cleanroom processing. If you are processing non-critical substrates outside of a controlled cleanroom environment, then you may require a less thorough clean. Discuss cleaning requirements with your lab manager.

WARNING: Do not work with harmful chemicals without the appropriate safety training and personal protective equipment (PPE). The RCA cleaning steps should be performed at a chemical wet bench on which you should be trained by your facility's staff. Always read the Safety Data Sheet (SDS) before working with new chemicals.

The recommended cleaning procedure for our PTFE tools is a solvent wipe-down and room temperature RCA clean.

Step One
Remove the tool from the sealed bag and wipe down with IPA and a cleanroom wipe (i.e. Texwipe). Ideally this would be done in the cleanroom gowning room prior to putting the tool in a pass-through air shower. Consult with your cleanroom staff on proper procedure.

Step Two
Thoroughly wipe down or soak tool with acetone and then IPA. Rinse with DI water and dry.

Step Three (SC-1 - organics)
In a sufficiently large beaker, mix a solution of (5 H2O : 1 H2O2 : 1 NH4OH) and soak the tool for at least 10 minutes. Dump the solution and rinse with DI water at least twice.

Step Four (SC-2 - trace metals)
Dump the DI water from the previous rinsing. Mix a solution of (5 H2O : 1 H2O2 : 1 HCl) and soak the tool for at least 10 minutes. Dump the solution and thoroughly rinse with DI water.

Your tools should now be ready for use. Take care to store your tools in a clean environment, and redo this clean if you suspect contamination (i.e. if you dropped your tool on the ground).

Discuss tool cleaning with your facility's staff as they may have different or more stringent requirements.